Document Type

Article

Journal Title

Review of Scientific Instruments

Volume Number

61

Issue Number

12

First Page

3871

Last Page

3875

Version

Publisher PDF: the final published version of the article, with professional formatting and typesetting

Original Citation

Sheehan, D.P., M. Carillo and W. Heidbrink, Device for dispersal of micrometer- and submicrometer-sized particles in vacuum; Rev. Sci. Instrum. 61 3871 (1990).

Publication Date

12-1990

Disciplines

Physics

Abstract

A simple, versatile device for dispersing micrometer‐ and submicrometer-sized particles in vacuum is described. The source allows control of particle size (0.5 μm≤l≤200 μm) and particle flux density up to roughly 107 cm−2 s−1. Several types of microparticles were successfully dispersed.

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Physics Commons

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