Review of Scientific Instruments
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McWilliams, R., D. Edrich, R.C. Platt and D.P. Sheehan, Simple overdense rf plasma source; Rev. Sci. Instrum. 61 3460 (1990).
A simple, gas‐fed, radio‐frequency‐driven plasma source is described. By use of lower hybrid waves, noble gas plasmas were produced with electron densities up to 10^12 cm -3 over a range of magnetic fields from 400 G to 1.5 kG and rf frequencies from 2–220 MHz.
Digital USD Citation
McWilliams, R.; Edrich, D.; Platt, R. C.; and Sheehan, D. P., "Simple overdense rf plasma source" (1990). Physics and Biophysics: Faculty Scholarship. 19.